Resist stripping and lift-off equipment for semiconductor miniaturization
High-precision and high-efficiency resist stripping equipment that supports the microfabrication process.
In the semiconductor industry, especially in the miniaturization process, the precision of resist removal significantly affects product quality. In the formation of fine patterns, the presence of resist residues or foreign substances can lead to critical defects. Our batch-type automatic resist stripping and lift-off equipment achieves high stripping performance and uniformity, contributing to improved yield. 【Application Scenarios】 - Fine wiring processing - Resist removal for high aspect ratio structures - Lift-off processing at the wafer level 【Benefits of Implementation】 - Improved yield - Stabilization of quality - Reduction of running costs
- Company：日精 本社
- Price：50 million yen-100 million yen
